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Mtengo wofunikira wa chinyezi mu chipinda choyera cha semiconductor (FAB).

Mtengo wofunikira wa chinyezi mu chipinda choyera cha semiconductor (FAB) ndi pafupifupi 30 mpaka 50%, zomwe zimalola malire ang'onoang'ono a zolakwika za ± 1%, monga zone ya lithography - kapena kucheperapo mu far ultraviolet processing (DUV) zone - pomwe kwina akhoza kumasuka ku ± 5%.
Chifukwa chinyezi chachifupi chimakhala ndi zinthu zingapo zomwe zingachepetse magwiridwe antchito a zipinda zoyera, kuphatikiza:
1. Kukula kwa bakiteriya;
2. Malo kutentha chitonthozo osiyanasiyana antchito;
3. Electrostatic charge ikuwoneka;
4. Zitsulo dzimbiri;
5. Mpweya wamadzi condensation;
6. Kuwonongeka kwa lithography;
7. Kuyamwa madzi.

Tizilombo toyambitsa matenda ndi zinthu zina zowononga zachilengedwe (nkhungu, mavairasi, mafangasi, nthata) zimatha kukhala bwino m'malo okhala ndi chinyezi chopitilira 60%. Madera ena a mabakiteriya amatha kukula pachinyezi choposa 30%. Kampaniyo imakhulupirira kuti chinyezi chiyenera kuyendetsedwa pakati pa 40% mpaka 60%, zomwe zingachepetse zotsatira za mabakiteriya ndi matenda opuma.

Chinyezi chapakati pa 40% mpaka 60% chimakhalanso chapakatikati kuti chitonthozedwe ndi anthu. Chinyezi chochuluka chimapangitsa anthu kumva kuti ali ndi vuto, pomwe chinyezi chochepera 30% chimapangitsa kuti anthu azimva youma, khungu lophwanyika, kusapeza bwino m'mapumu komanso kusasangalala.

Chinyezi chokwera kwambiri chimachepetsa kudzikundikira kwa ma electrostatic charges pamalo oyeretsa - zotsatira zomwe mukufuna. Chinyezi chochepa ndi choyenera kuti chiwonjezeke kwa ndalama komanso gwero lomwe lingathe kuwononga ma electrostatic discharge. Chinyezichi chikamaposa 50%, ma electrostatic charger amayamba kutha mwachangu, koma chinyezi chikakhala chochepera 30%, amatha kupitilirabe kwa nthawi yayitali pa insulator kapena pamtunda wopanda maziko.

Chinyezi chapakati pa 35% ndi 40% chitha kugwiritsidwa ntchito ngati kunyengerera kokwanira, ndipo zipinda zoyera za semiconductor nthawi zambiri zimagwiritsa ntchito zowongolera zina kuti achepetse kuchuluka kwa ma electrostatic charges.

Kuthamanga kwazinthu zambiri zamakina, kuphatikiza njira za dzimbiri, kumawonjezeka ndi kuchuluka kwa chinyezi. Malo onse omwe amawululidwa ndi mpweya kuzungulira chipinda choyera ndichangu.


Nthawi yotumiza: Mar-15-2024